Importance

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Abstract

A vacuum degree inspecting device wherein a high degree of accuracy is not required for positioning of an object vessel and the degree of vacuum of an object vessel can be detected with a high S/N ratio under a reduced influence of fluctuations in size or configuration of a top (lid) wall of an object vessel. The device comprises a great diameter lens for refracting rays of light from a light source into rays of light to be irradiated upon an area including a lid wall of a sealed up vessel held at a predetermined inspection position, a beam splitter for passing part of rays from the great diameter lens therethrough and for reflecting reflected rays from the lid wall of the sealed up vessel, a condenser lens for condensing reflected rays from the beam splitter, an image sensor for detecting the thus condensed rays, and a comparator circuit for comparing an output voltage of the image sensor with a reference voltage to develop a signal representing that the sealed up vessel is acceptable or to be rejected.

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First Claim