Process for determining photoresist develop time by optical transmission

United States of America Patent

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Jul 25, 1989
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N/A
app pub date
Dec 17, 1987
filing date
Dec 17, 1987

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Expired

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Abstract

A reflective beam of light is used to analyze the optical transmission properties of a developer fluid during puddle develop of photoresist polymer for detercting the process endpoint.

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Patent Owner(s)

Patent Owner	Address
TEXAS INSTRUMENTS INCORPORATED	DALLAS TX 75265-5474

International Classification(s)

G03G:ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Millis, Edwin G	Dallas, TX	9	302
Wood, Jr Samuel J	Plano, TX	3	128

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Process for determining photoresist develop time by optical transmission

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07134404

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PATENT NO	4851311
SERIAL NO	07134404
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07134404

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