Energy-selected electron imaging filter

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United States of America Patent

PATENT NO 4851670
SERIAL NO

07090443

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Abstract

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Quadruple lenses 30, 31 and 32 and sextupole lenses 40, 41, 42, and 43 are interposed between a energy-dispersing device 17 and an electron imaging device 50 in an energy-selected electron imaging filter. The energy-dispersing device produces a focussed spectrum 21 of electron energies in the plane of an energy-selecting slit 20, and the quadrupole and sextupole lenses transform the spectrum into an energy-selecting slit may also be either removed or opened wide, and the quadrupole lenses may be refocussed, so that the electron imaging device directly observes a magnified spectrum of the electron energies.

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Patent Owner(s)

Patent OwnerAddress
GATAN INC1100 CASSATT ROAD BERWYN PA 19312

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krivanek, Ondrej L Oakland, CA 15 310

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