Illumination device using a laser

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United States of America Patent

PATENT NO 4851978
SERIAL NO

07135378

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An illumination device forms a secondary light source having N spots by vibrating a laser beam having a wavelength .lambda. emitted from a pulsed laser by a vibration mirror having a swing angle .theta..sub.0, and irradiates an object to be illuminated through a plurality of lens elements arranged at a spacing d. Those elements meet relations of d=m.(.lambda./.theta..sub.0) N.(.lambda./.theta..sub.0)>M.d where M is the number of lens elements in a predetermined array direction of the plurality of lens elements included in at least a spatial coherent area and m is any integer. Light intensity of the pulsed laser illumination is adjusted such that a total light intensity of the laser beam having pulses satisfying the above relations is equal to a light intensity required for the object to be illuminated.

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Patent Owner(s)

  • NIKON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichihara, Yutaka Yokohama, JP 46 1563

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