Wafer probes
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United States of America Patent
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-
Aug 1, 1989
Issued Date -
N/A
app pub date -
Jul 11, 1988
filing date -
Dec 23, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer probe comprises a support member having an end region which is shaped to permit the end region to be brought into close proximity with a component under test. An amplifier is mounted on the support member at its end region. A conductive probe element is attached to the amplifier and is electrically connected to the amplifier's input terminal. A transmission line is connected to the amplifier's output terminal for transmitting signals from the amplifier to a measurement instrument.
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