Developing apparatus

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United States of America Patent

PATENT NO 4855775
SERIAL NO

07184806

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a developing apparatus according to the present invention, a supply path of a developing solution is formed in a cup member which constitutes a dip tank of the developing solution so that the spraying pressure of the developing solution is not directly applied to an object to be processed. As a result, uniform, high-quality images can be developed on an entire area of the object.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED A CORP OF JAPAN1-26-2 NISHI-SHINJUKU SHINJUKU-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuoka, Fuminori Kofu, JP 5 27

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