Wafer inspecting apparatus
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United States of America Patent
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-
Aug 15, 1989
Issued Date -
N/A
app pub date -
Feb 10, 1988
filing date -
Jan 21, 1985
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Semiconductor wafer inspecting apparatus comprises plural supports each adapted to support a wafer to be inspected and a feeder for feeding a wafer to each of the plural supports. The apparatus can effect accurate and rapid positioning of the wafer.
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