Ventilated clean room work station with aerodynamic exhaust baffle
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United States of America Patent
Stats
-
Aug 29, 1989
Grant Date -
N/A
app pub date -
Jul 21, 1988
filing date -
Jul 21, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A ventilated work station for wet processing in laminar flow clean rooms is provided in which an aerodynamically shaped baffle comprises four continuous, curved surfaces which direct laminar air flow across the work station without creating hazardous conditions due to loss of fume containment. The laminar flow is further maintained without the creation of undesirable particle concentrating vortices at, or near, the work station surface. The aerodynamic exhaust baffle has two vertical surfaces joined by the two curved surfaces. Exhaust ducts are positioned along the first curved surfaces to thereby enhance the laminar flow contours.
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