Laser scribing system and method
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United States of America Patent
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-
Aug 29, 1989
Issued Date -
N/A
app pub date -
Sep 16, 1987
filing date -
Sep 26, 1986
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A laser scribing system and method is described. In the system, a film formed on a substrate is irradiated with laser beam which is focused on a limited portion of the film in order to remove the portion and produce a groove. Laser beam used for eliminating the portion of film formed on a substrate is deprived of its border portion in advance of the focusing. Spherical aberration is suppressed due to this elimination.
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Cited Art Landscape
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