Electron storage source for electron beam testers
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United States of America Patent
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Aug 29, 1989
Grant Date -
N/A
app pub date -
Sep 30, 1988
filing date -
Sep 30, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An electron beam tester (11) utilizes a source (13) of stored electrons to produce a probing beam (14) of short pulses and high intensity. The high intensity improves the signal-to-noise ratio of the potential being measured and is especially suited for measuring potentials in high speed integrated circuits (19) while they are operating. The cyclotron principle is adapted for storing the electrons in an orbital configuration wherein the electrons are clustered in bunches having substantially the same energy level. These characteristics of the electrons in a beam facilitate its operation and control in an electron beam tester for contactless monitoring of voltage potentials in an operating high speed integrated circuit.
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