Capacitive pressure sensor
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United States of America Patent
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-
Sep 5, 1989
Grant Date -
N/A
app pub date -
Apr 19, 1988
filing date -
Apr 19, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A dual capacitive pressure sensor includes matched variable capacitors which are immune to vibration and acceleration, but which respond equally to changes in external fluid pressure level. The structure of the sensor is configured to avoid calibration drift as the sensor ages, as well as to provide electrical shielding for the variable capacitors of the sensor.
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