Optical imaging arrangement comprising an opto-electronic focussing-error detection system

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United States of America Patent

PATENT NO 4866262
SERIAL NO

07157103

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Abstract

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An optical imaging arrangement is described which comprises an opto-electronic focussing-error detection system (1, 2, 3, 4, 5, 6, 12, 13, 14, 18, 19, 20, 21) for determining a deviation between the image plane (P.sub.L) of the imaging system (L) and a second plane (P.sub.S) in which the image is to be formed. The image plane (P.sub.F) of the focussing-error detection system is adjustable, for example by means of a pivotable plane-parallel plate (15), so that the zero point of the focussing-error signal (S.sub.f) is adjustable.

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Patent OwnerAddress
ASM LITHOGRAPHY B VDE RUN 1110 NL-5503 LA VELDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biesterbos, Johannes W M Eindhoven, NL 2 19
van, der Werf Jan E Eindhoven, NL 15 801

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