Microwave enhanced CVD method for depositing carbon
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United States of America Patent
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Sep 26, 1989
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N/A
app pub date -
Feb 24, 1988
filing date -
Feb 24, 1987
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Expired
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Abstract
A method of making a diamond or diamond-like carbon containing 0.01-1.0 weight percent nitrogen on a substrate where an electromagnetic energy is applied to a productive gas comprising carbon and an additive gas comprising nitrogen and the above carbon product is deposited on a substrate.
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