Carbon deposition by ECR CVD using a catalytic gas
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United States of America Patent
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Oct 3, 1989
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N/A
app pub date -
Jul 8, 1988
filing date -
Jul 13, 1987
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Expired
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Abstract
A material consisting mainly of carbon can be formed on a surface by virtue of a microwave energy. A catalyst gas is introduced into a reaction chamber for ECR CVD, along with a carbon compound gas. The catalyst gas consists of a gaseous compound of germanium such as GeH.sub.4 and GeF.sub.4.
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