Driving mechanism having a pressure member
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United States of America Patent
Stats
-
Oct 10, 1989
Grant Date -
N/A
app pub date -
Feb 29, 1988
filing date -
Jun 11, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A driving mechanism having a driving shaft, which is rotatable about a first axis and on which a pressure member is located. The pressure member has a first roller segment which engages a fixed support and a second roller segment which engages an adjustment member. The adjustment member can be coupled to a load displaceable parallel to a second axis. The driving mechanism is particularly suitable for comparatively small and accurate displacements of a load, such as, for example, a mask table in an opto-lithographic apparatus.
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