Method and apparatus for the ion implantation of spherical surfaces
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United States of America Patent
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Oct 10, 1989
Grant Date -
N/A
app pub date -
Mar 11, 1988
filing date -
Mar 11, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and an apparatus for the ion implantation of spherical surfaces are disclosed. The method essentially includes the provision of a fixture by which a plurality of spherical workpieces are presented to a large area ion beam in a way that their entire respective spherical surfaces are uniformly ion implanted to improve their surface characteristics. The fixture basically includes a solid disc mounted for motion about two axes normal to each other, a plurality of cages formed in a first surface of the disc loosely to accommodate therein a plurality of spherical workpieces, cooling means disposed on a second surface of the disc, and a cover plate and/or mask mounted on the first surface of the disc and provided with a plurality of apertures concentric with the plurality of cages formed in the disc.
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