Oxygen glow treating of ZnO electrode for thin film silicon solar cell
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United States of America Patent
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Oct 10, 1989
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N/A
app pub date -
Nov 18, 1988
filing date -
Nov 18, 1988
priority date (Note) -
Expired
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Abstract
An improved method for making solar cells of the type wherein a thin film silicon hydrogen alloy structure is deposited upon a transparent zinc oxide conductive film. Before deposition of the TFS film, the zinc oxide film is treated with a glow discharge comprising oxygen.
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