Process control interface with simultaneously displayed three level dynamic menu

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United States of America Patent

PATENT NO 4873623
SERIAL NO

07050925

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system and method for computer control of machine processes. The operator of the system selects and specifies process control parameters through the use of a three level dynamic menu. The first level of the menu is used to select a group of process parameters. The second and third menus together have the visual appearance of a set of index cards, the second menu forming tabs on the index cards, and the third menu comprising the set of process parameters listed on each index card. Each process parameter has a preassigned entry status: operator unalterable, operator alterable, forced operator entry, or single time forced entry (value must be entered only once when the process is run several times). The selected process cannot be run until values have been entered for all parameters having an entry status of forced operator entry or single time forced entry. Edit field parameters limit the operator's options to a predefined set of parameter values. Edit field parameters are also used to specify complicated parameter values having a multiplicity of subparameter values. The defination of each process can include a measurement data structure which defines measurement data to be collected during the running of the process. The measurement data to be collected is specified by specifying a set of data analysis tasks, and specifying the measurement data needed for each data analysis task. The measurement data structure includes definitions of the specified data analysis tasks and the measurements to be collected.

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Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS (A CA CORP )2400 CHARLESTON ROAD MOUNTAIN VIEW CA 94043

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kumagi, Shoji Santa Clara, CA 2 415
Lane, Leslie A Santa Clara, CA 7 896
Lybeck, Lynn V Moss Beach, CA 6 693
Perloff, David S Sunnyvale, CA 11 1093

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