Fluid level sensing method and apparatus
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United States of America Patent
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Nov 21, 1989
Grant Date -
N/A
app pub date -
Nov 21, 1988
filing date -
Nov 21, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A fluid level sensor is provided in a fluid dispensing system, primarily in a photoresist dispensing system used in a semiconductor manufacturing process. A bubble is introduced into the fluid shortly before fluid supply is emptied, said bubble being used to detect a low fluid level. The invention uses a snap-on combination cap and pickup tube, the pickup tube having a small hole near its lower tip, and the cap containing an optical bubble detector.
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