Electrical characteristic measuring apparatus
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United States of America Patent
Stats
-
Nov 28, 1989
Grant Date -
N/A
app pub date -
Jun 20, 1988
filing date -
Jun 24, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrical characteristic measuring apparatus including, a table for an object to be measured, wherein the table is formed of an insulating material. The generation of an eddy current by an electromagnetic induction effect due to noise can be prevented from occurring in the table. Therefore, the electrical characteristics of the object to be measured can be measured using a very small current with high accuracy. Further, since the insulating resistance of the table is high, electrical discharging can be prevented from occurring between the object to be measured and a ground portion when measuring with a large current. As a result, electrical characteristics can be measured with high accuracy using a large current which is 50 times or more that of a current used in a conventional apparatus.
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