Importance

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Abstract

A fluid control valve used in a flow controller has an actuator for controlling the spacing of a valve seat that cooperates with a surface surrounding an orifice in a valve body. The actuator is modulated to regulate the spacing of the seat from the valve body orifice to control flow through the orifice, and to create a seal when desired. The valve seat has a thin metallic sealing disc, compatible with the fluid being controlled that is supported with a fluid, preferably a substantially incompressible fluid, such as a silicon oil, so the disc can conform to surface irregularities and misalignments of the mating surface. The fluid filling will displace or compress to permit the sealing disc to conform to the seat and effect a seal at relatively low valve forces.

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First Claim