Method and apparatus for rinsing materials or articles

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United States of America Patent

PATENT NO 4895604
SERIAL NO

07269496

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Abstract

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A method and an apparatus for rinsing materials or articles to remove deposits attached onto the surfaces of those materials or articles and humidity from the them by vapor of rinsing solvent which is evaporated by heating and filled in a rinsing chamber. In the method or the apparatus when it is detected that the vapor having been cooled to a temperature lower than that of the predetermined reference level, occurence or generation of failure in rinsing operation can be grasped.

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Patent Owner(s)

Patent OwnerAddress
DAINIPPON SCREEN MFG CO LTDKYOTO CITY KYOTO PREFECTURE JAPAN

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Noriyuki Hikone, JP 78 983

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