Scattering-type particle detection device for use in high temperature process chambers
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United States of America Patent
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Jan 23, 1990
Grant Date -
N/A
app pub date -
May 27, 1988
filing date -
May 27, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A particle detector includes optical fiber for conducting short wavelength radiation received from a radiation source through a chamber in which a semiconductor wafer is being processed. Light that is scattered by contaminant particles in the process chamber is sensed by an optical fiber pickup, and pulse signals are generated by a photosensing means to provide an indication of the number of particles within the process chamber.
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