Importance

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Abstract

A pressure sensor including a cylindrical metallic housing having an open end having an opening, a ceramic pressure sensing element having a ceramic diaphragm and fixedly accommodated within an open end portion of the metallic housing, and a strain detector associated with the ceramic diaphragm. The ceramic diaphragm is exposed at one of opposite major surfaces thereof to an external space through the opening of the metallic housing and is deformable in response to a pressure of a measurement fluid in the external space. An electrical output of the strain detector varies with an amount of deformation of the ceramic diaphragm, thereby representing the pressure of the fluid. The sensor further includes a metallic sealing member which is fluid-tightly bonded to a peripheral portion of the ceramic pressure sensing element with a bonding material, and which is fluid-tightly welded to the open end portion of the cylindrical metallic housing, so that the pressure sensing element is fluid-tightly secured to the metallic housing through the metallic sealing member, whereby an interior of the metallic housing is sealed with respect the external space.

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First Claim