Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
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United States of America Patent
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-
Feb 20, 1990
Grant Date -
N/A
app pub date -
Mar 15, 1988
filing date -
Mar 16, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and device are provided to prevent grooves from occurring on a cathode surface of a cathode arc discharge evaporating device by adding a second movement to a first rotational movement of a magnetic field generator within the device, which enables the arc spot to scan a substantial portion of the cathode surface.
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