Beam intensity profilometer
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United States of America Patent
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Apr 10, 1990
Grant Date -
N/A
app pub date -
Apr 22, 1988
filing date -
Apr 22, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A beam intensity profilometer produces a fluorescent emission distribution having a spatial distribution linearly proportional to the local intensity of an incident UV beam shined into the profilometer. The spatial distribution of the UV beam is analyzed and displayed as a function of the fluorescent emission.
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