Low power solid state gas sensor with linear output and method of making the same
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United States of America Patent
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Apr 17, 1990
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N/A
app pub date -
Jan 23, 1989
filing date -
Nov 9, 1983
priority date (Note) -
Expired
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Abstract
The present invention is directed towards a low power, solid state gas sensor and method of making the same. The sensor comprises a heating element formed from a wire coiled about an axis, a sensing whisker placed inside the heating coil substantially in plane with said axis, and a metal oxide semiconductor material whose resistance varies with the object gas concentration. The gas sensors of this type operate at less than 150 mA. In addition, gas sensors of the present invention exhibit a substantially linear response over a significant concentration of the object gas.
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