Modular wafer transport and processing system
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United States of America Patent
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-
Apr 17, 1990
Issued Date -
N/A
app pub date -
May 26, 1989
filing date -
Apr 28, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment to a processing module.
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Cited Art Landscape
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