Importance

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Abstract

An illuminating optical device having an optical integrator capable of receiving a light flux from a light source and substantially forming a plane light source comprising a plurality of light source images and uniformly illuminating an object includes a square-pillar-like internal reflection type integrator having a plurality of reflecting surfaces capable of reflecting the light flux from the light source and forming a plurality of virtual images of the light source on a plane near the entrance surface thereof, a fly-eye type integrator comprising a plurality of lens elements receiving the light flux from the light source and capable of forming a plurality of light source images on a plane, the lens elements being juxtaposed in proximity to one another, and relay lens means provided between the two integrators so that the exit surface of one of the two integrators which is adjacent to the light source and the entrance surface of the other integrator which is adjacent to the object are substantially conjugate with each other.

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First Claim