Method and apparatus for vacuum vapor deposition
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 24, 1990
Grant Date -
N/A
app pub date -
Mar 2, 1988
filing date -
Mar 6, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
During electric arc discharge discrete points of the cathode surface are so strongly heated that ionized cathode material is volatilized. Use of such hot spots as vapor source for vacuum coating is, however, impaired by the fact that a short time after beginning of the vapor emission from a hot spot molten material in the form of droplets is also hurled away. The invention provides continuous vapor deposition on the cathode surface with a metal compound which can be broken down, by which accelerated migration of the vapor emitting hot spots is forced in such a way that the hot spots migrate away from a particular site before spatter formation starts. The cathode surface is preferentially continuously sputtered so strongly that the metal quantity supplied to it through the metal compound is 12 to 25% of the quantity of metal carried off through vaporization from hot spots. An installation for carrying out the invention includes two cathodes which continuously coat each other in the presence of a gas forming the requisite metal compound.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully