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Abstract

A method for testing the hermeticity of a sealed cavity within a microelectronic, semiconductor, or other electronic component package includes pressure bombing the package within a detector-fluid bath, attempting thereby to introduce liquid detector fluid into the cavity through any leaks. A detector fluid is used whose vapor state possesses a distinctive physical characteristic that is detectable with known instrumentation. The package is then removed from the bath to permit a quantity of any detector fluid introduced into the cavity to vaporize and evolve for detection. Heating and vibrating the package may be employed to accelerate detector fluid outgassing, together with vacuum withdrawal of the vapor, and detection may employ measurement of infrared absorption. A system for detecting evolving detector fluid vapor includes both a test cell with which to confine the vapor and the instrumentation for measuring infrared absorption of test cell contents. The volume of the test cell is proportioned to the cavity size to inhibit dilution of evolving detector-fluid vapor beyond the detection capabilities of the instrumentation employed.

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First Claim