Importance

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Abstract

The invention relates to a pressure sensor having a ceramic diaphragm which is exposed at one of opposite surfaces thereof to a measurement fluid in an external space and deformable in response to a pressure of the measurement fluid, and a strain detector for producing an electrical output representative of an amount of deformation of the ceramic diaphragm. The ceramic diaphragm is fixedly supported at an outer portion thereof, so that a central working portion of the diaphragm is deformable in response to the pressure of the measurement fluid applied thereto. The sensor includes a baffling structure disposed adjacent the above-indicated one surface of the ceramic diaphragm. The baffling structure has portions which partially define a chamber to which the above-indicated one surface of the ceramic diaphragm is exposed. The baffling structure has at least one communication hole for communication between the chamber and the external space, such that the central working portion of the ceramic diaphragm is protected against direct exposure to a straightforward flow of the measurement fluid from the external space toward the central working portion of the diaphragm.

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First Claim