Importance

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Abstract

An electro-mechanical probe is comprised of a thin flat ring-shaped frame, and an elastic transparent membrane which is attached to a downward-facing surface of the ring-shaped frame and which traverses the aperture of the ring. On this membrane are a plurality of microscopic conductive bumps which are aligned with and which are outside of the aperture of the ring. Also integrated into the membrane are a plurality of microscopic conductors, and they serve as a means for sending electrical signals to and receiving electrical signals from the bumps. In operation, the probe frame is fitted with a cover which overlies the elastic membrane to thereby form an enclosed chamber. Both the cover and the elastic membrane are transparent so that the bumps on the membrane can be aligned with corresponding contacts on a semiconductor chip or interconnect module which is to be tested. A port is provided in the cover so that a gas can be input to the chamber to expand the elastic membrane and thereby force the bumps against the contacts of the circuit being tested.

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First Claim