Hermetically sealed multilayer electrical feedthru
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United States of America Patent
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-
May 1, 1990
Issued Date -
N/A
app pub date -
Feb 1, 1988
filing date -
Apr 9, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for producing miniature, planar, hermetically sealed, electrical feedthrus having multiple layers of molybdenum conductors separated by aluminum which is anodized and selectively etched for providing supports for the multilayer. The exposed molybdenum is cleaned and oxidized and sealed with glass to provide a hermetic seal. Contact portions of the molybdenum are cleaned and plated whereby the contacts will accept a contact seal.
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Cited Art Landscape
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