Wafer transfer apparatus having an improved wafer transfer portion
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United States of America Patent
Stats
-
May 8, 1990
Grant Date -
N/A
app pub date -
Nov 22, 1988
filing date -
Nov 27, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for storing and transferring a wafer. The apparatus includes a wafer transfer portion having a path through which a wafer can be transferred; structure for storing the wafer, the structure for storing the wafer being removably attached to the wafer transfer portion; a first elevator for elevating and lowering the wafer transfer portion and the storing structure to a predetermined level; a holder for temporarily holding the wafer in the wafer transfer portion; and a second elevator for elevating and lowering the wafer holder, the second elevator being separate and independent from the first elevator. Since the wafer storing structure and the wafer transfer portion are elevated and lowered by different elevators, the wafer can be transported while the wafer transfer portion is stationary. Thus, the apparatus has a simplified construction and replacement of the storing structure can be automated.
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