Oscillator using H-shaped single crystal silicon vibrator
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United States of America Patent
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May 15, 1990
Grant Date -
N/A
app pub date -
Sep 16, 1988
filing date -
May 27, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.
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