Sensor devices with internal packaged coolers

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United States of America Patent

PATENT NO 4926227
SERIAL NO

06891627

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Heat sensitive sensors, such as charge coupled devices which must be cooled to reduce dark current leakage, are packaged in a chip carrier and in contact with the cold surface of an electrothermal cooler the warm opposite surface of which contacts the floor of the carrier to heat the carrier body and the window of the chip carrier to prevent fogging of the cover glass while the sensor remains cold.

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Patent Owner(s)

Patent OwnerAddress
NANOMETRICS INCA CALIFORNIA CORPORATION 690 EAST ARQUES AVENUE SUNNYVALE CA 94086

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jensen, Earl M San Jose, CA 16 627

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