Closed-loop capacitive accelerometer with spring constraint
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United States of America Patent
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May 29, 1990
Grant Date -
N/A
app pub date -
Feb 28, 1989
filing date -
Feb 28, 1989
priority date (Note) -
Expired
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Abstract
A micromachined three-plate capacitive accelerometer incorporates hinges attached to top and bottom surfaces of the proof mass that are symmetric about X and Y axes and also about diagonal axes; passageways for gas film damping in the fixed members that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.
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