Chemical coating apparatus
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United States of America Patent
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-
Jun 12, 1990
Grant Date -
N/A
app pub date -
Dec 5, 1988
filing date -
Dec 18, 1987
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A chemical coating apparatus has a heat exchanger disposed along a pipe for transporting a chemical for adjusting the temperature of the chemical to a predetermined value through a corresponding flow of constant-temperature water. Further, a temperature detector is provided in the vicinity of a nozzle through which the chemical is discharged to detect the temperature of the constant-temperature water. Therefore, it is possible to make uniform the thickness of chemical films applied to objects.
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