US Patent No: 4,933,318

Number of patents in Portfolio can not be more than 2000

Plasma etch of masked superconductor film

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Abstract

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A method of manufacturing a thin film of an oxidic superconducting material in accordance with a pattern, in which a pattern is manufactured by means of etching using reactive ions and a mask of aluminium oxide or silicon oxide, said method enabling patterns having line widths smaller than 2 .mu.m to be manufactured with great accuracy without influencing the composition of the superconducting thin film in such a manner that the superconducting properties deteriorate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
U.S. PHILIPS CORPORATIONNEW YORK, NY11382

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heijman, Maritza G J Eindhoven, NL 5 48

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (2)
4,657,844 Plasma developable negative resist compositions for electron beam, X-ray and optical lithography 8 1985
4,690,729 Tapered trench process 49 1986
 
Bell Telephone Laboratories, Incorporated (1)
4,683,024 Device fabrication method using spin-on glass resins 39 1985
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
4,560,435 Composite back-etch/lift-off stencil for proximity effect minimization 114 1984
 
MOTOROLA, INC. (1)
4,687,543 Selective plasma etching during formation of integrated circuitry 32 1986

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (2)
5,650,377 Selective epitaxial growth of high-T.sub.C superconductive material 6 1993
6,001,268 Reactive ion etching of alumina/TiC substrates 9 1997
 
QIMONDA AG (2)
6,454,956 Structuring method 9 1998
6,315,913 Structuring method 5 1998
 
AGILENT TECHNOLOGIES, INC. (1)
5,212,147 Method of forming a patterned in-situ high Tc superconductive film 50 1991
 
CANON KABUSHIKI KAISHA (1)
5,389,313 Method of producing a molding die for an information recording medium 10 1992
 
EASTMAN KODAK COMPANY (1)
5,552,373 Josephson junction device comprising high critical temperature crystalline copper superconductive layers 4 1992
 
MITSUBISHI MATERIALS CORPORATION (1)
5,075,200 Process of forming superconductive wiring strip 2 1989
 
SAMSUNG ELECTRO-MECHANICS CO., LTD. (1)
5,219,830 Process for preparing high-Tc superconducting integrated circuits 1 1991
 
Santa Barbara Research Center (1)
5,041,188 High temperature superconductor detector fabrication process 2 1990
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (1)
5,840,204 Method for patterning a layer on oxide superconductor thin film and superconducting device manufactured thereby 2 1995
 
TRW INC. (1)
5,286,336 Submicron Josephson junction and method for its fabrication 5 1992
 
VERIZON LABORATORIES INC. (1)
5,173,678 Formed-to-shape superconducting coil 15 1990
 
VISTEON GLOBAL TECHNOLOGIES, INC. (1)
6,331,680 Multilayer electrical interconnection device and method of making same 7 1996