Probe card fixture

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4935694
SERIAL NO

07247088

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A probe card fixture (20) precisely controls the movement of a probe card (44) relative to a circuit (30) to be tested. The fixture (20) includes a carriage (42) movable to and from the circuit by four lead screws (237) all simultaneously driven by a rigid drive link (300). The probe card (44) is mounted to the carriage (42) by mechanisms that provide for adjustment of the orientation of the probe card (44) to correspond to the orientation of the particular batch of circuits (30) to be tested. A programmable control system (350) controls the lead screw drive to minimize travel of the carriage (42), thereby increasing throughput.

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Patent Owner(s)

  • ELECTRO SCIENTIFIC INDUSTRIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clarridge, Glenn R Portland, OR 1 5

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