Piezoelectric micropump with microvalves
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United States of America Patent
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-
Jul 3, 1990
Grant Date -
N/A
app pub date -
Feb 4, 1988
filing date -
Feb 4, 1988
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A silicon micropump which can be manufactured by established integrated circuit techniques, and which is provided with piezoelectric valves, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves are made in silicon and glass, while the valves contain piezoelectric material, which allows opening and closing of the valves by electrical means.
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