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Abstract

An illumination optical apparatus includes secondary light source forming means for forming a plurality of light source images from collimated light beams emitted from a light source, tertiary light source forming means arranged midway along an optical path from the secondary light source forming means, and a condenser lens arranged midway along an optical path from the tertiary light source forming means. The secondary light source forming means includes an optical integrator having entrance and exit surface. A plurality lens surface having a larger focal length than a distance between the entrance and exit surfaces are formed on the entrance sarfaces. Thus, a plurality of secondary light source images are formed by the secondary light source forming means in a space behind the exit surface of the optical integrator.

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First Claim