Transfer apparatus for plate-like member
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United States of America Patent
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-
Jul 17, 1990
Grant Date -
N/A
app pub date -
Oct 21, 1988
filing date -
Oct 21, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.
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