Force transducer etched from silicon
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 7, 1990
Grant Date -
N/A
app pub date -
Mar 6, 1989
filing date -
Mar 6, 1989
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. a second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully