Turbo-molecular pump
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United States of America Patent
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-
Aug 7, 1990
Grant Date -
N/A
app pub date -
Mar 16, 1989
filing date -
Mar 18, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides a turbo-molecular pump in which an exhaust action is achieved by virtue of the combination of stationary blades and rotor blades adapted to rotate at high speed and to cooperate with each other to impart momentum to gaseous molecules rushing in against the blades under an extremely low-pressurized condition. Disposed inside the casing are a fixed shaft and the rotor, the latter being movably supported by a pair of active radial magnetic bearings. A motor is interposed between said pair of magnetic bearings. A dynamic damper is provided at one end of the fixed shaft to inhibit the occurrence of vibrations.
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