Vibrating force sensor
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United States of America Patent
Stats
-
Aug 14, 1990
Grant Date -
N/A
app pub date -
Mar 9, 1989
filing date -
Mar 16, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vibrating force sensor comprising a metallic strip having three metallic coplanar beams (20, 21, 22). The sensor also includes capacitive transducers (30, 31) for driving the beam or beams into flexural vibration in a plane normal to their common plane and for detecting changes in the frequency of vibrations in response to changes in tension applied to the sensor. Drive and detect electrodes (50, 51) are formed on the surface of an intermediate insulating layer (70) in turn located on the surface of a shielding layer (71) of conductive material.
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