Apparatus and method for transferring wafers between a cassette and a boat
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United States of America Patent
Stats
-
Aug 14, 1990
Grant Date -
N/A
app pub date -
Dec 7, 1988
filing date -
Dec 7, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for transferring wafers comprises a turntable for orienting a plurality of wafers which are loaded in a cassette, a lifting mechanism for lifting the wafers away from the cassette, a plurality of opening/closing chuck mechanisms, and a slide movement mechanism for conveying the wafers which are held by the opening/closing mechanism onto a boat. The cassette on the turntable is turned selectively through an angle of 180.degree. and wafers are lifted by the link mechanism all at a time and selectively held by the opening/closing chuck mechanism. The wafers thus held are conveyed to a location of a boat where they are loaded onto the boat in a face-to-face relation.
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