Deposition of diamond films

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United States of America Patent

PATENT NO 4948629
SERIAL NO

07309521

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Abstract

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Diamond films are deposited at substrates below temperatures of 400.degree. C. by chemical vapor deposition using a high powered pulsed laser and a vapor which is an aliphatic carboxylic acid or an aromatic carboxylic anhydride.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATION A CORP OF NYARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hacker, Nigel P Morgan Hill, CA 32 584
Tyndall, III George W Los Gatos, CA 3 53

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