Electric probing test machine
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United States of America Patent
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Aug 21, 1990
Issued Date -
N/A
app pub date -
Jan 26, 1990
filing date -
Nov 30, 1987
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electric probing test machine including a test stage unit which is constructed as an independent component of at least one system and used to test the electrical characteristics of a wafer by having the wafer on the stage contacted by a multitude of probes and a loading/unloading unit which is constructed as an independent component of at least one system and used to bring a wafer from a wafer cassette to the stage of the test stage unit or from the stage of the test stage unit to the wafer cassette. The loading/unloading unit is combined with the test stage unit in such a way that the loading/unloading unit can be separated and moved away from the test stage unit.
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